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Industry & Entertainment
HBO mercury short arc lamps (>200W) for microlithography
HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers
Product availability
All microlithography lamps remain fully available.
Key features and benefits
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High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
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Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
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Designed for long lasting performance
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Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
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High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
-
Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
-
Designed for long lasting performance
-
Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
HBO for ASML
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High-performance semiconductor lamps for ASML i-line systems
HBO for Canon
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High performance semiconductor lamps for Canon i-line systems
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High performance semiconductor lamps for Canon FPD systems
HBO W for Nikon
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High performance semiconductor lamps for Nikon i-line systems
HBO for Süss
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High performance semiconductor lamps for Süss systems
HBO for other equipment
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High performance semiconductor lamps for other systems
HBO for ASML
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High performance semiconductor lamps for ASML i-line systems
HBO for Canon
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High performance semiconductor lamps for Canon i-line systems
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High performance semiconductor lamps for Canon FPD systems
HBO W for Nikon
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High performance semiconductor lamps for Nikon i-line systems
HBO for Süss
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High performance semiconductor lamps for Süss systems
HBO for other equipment
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High performance semiconductor lamps for other systems
